Gas flow control plate for substrate processing apparatus



FIG. 1 is a top perspective view of a gas flow control plate for substrate processing apparatus showing our new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a side elevation view thereof; and,

FIG. 6 is a cross-sectional view, taken along a line 6-6 of FIG. 3 . 

CLAIM The ornamental design for a gas flow control plate for substrate processing apparatus, as shown and described. 